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【Grant-in-Aid for Scientific Research (S)】
Overall Understanding of Diverse Multidimensional Distributions in Plasma Processes for Functional Outputs

　In plasma, the parameter forms multi-dimensional space, and various distributions are observed. In this study, we focus on the space centered on thermal energy, physical space, and particle species in industrial plasmas, and investigate these three distributions experimentally and analytically. And then, we reveal the role of various distribution properties that intervene to reach the functional output such as the synthesis of fine particles. Here, we introduce and evaluate thermodynamic/information entropy as an evaluation quantity for the ambiguity, irreversibility, and spontaneous progression that caused by the spread of distribution, and at the same time, we investigate the scale-free nature an index of robustness for particle species distribution. Ultimately, we establish an academic regarding the analysis method of the spread of various distributions that can prove the superiority of plasma processes.